2/17/2011	9:55:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	9:55:09 AM	Recipe started at 9:55 AM
2/17/2011	9:55:09 AM	H2 valve closed
2/17/2011	9:55:09 AM	BCl3 valve closed
2/17/2011	9:55:09 AM	PH3 valve closed
2/17/2011	9:55:09 AM	SiCl4 pre valve closed
2/17/2011	9:55:09 AM	SiCl4 post valve closed
2/17/2011	9:55:09 AM	Main Vac valve closed
2/17/2011	9:55:09 AM	Bypass valve closed
2/17/2011	9:55:09 AM	Bubbler valve closed
2/17/2011	9:55:09 AM	Helium valve opened
2/17/2011	9:55:09 AM	Helium MFC set to  500.000000
2/17/2011	9:55:09 AM	H2 MFC set to  0.000000
2/17/2011	9:55:09 AM	BCl3 MFC set to  0.000000
2/17/2011	9:55:09 AM	PHl3 MFC set to  0.000000
2/17/2011	9:55:09 AM	SiCl4 MFC set to  0.000000
2/17/2011	9:55:09 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	9:55:09 AM	Tube furnace set to 0
2/17/2011	9:56:30 AM	Helium valve closed
2/17/2011	9:56:30 AM	H2 valve closed
2/17/2011	9:56:30 AM	BCl3 valve closed
2/17/2011	9:56:30 AM	PH3 valve closed
2/17/2011	9:56:30 AM	SiCl4 pre valve closed
2/17/2011	9:56:30 AM	SiCl4 post valve closed
2/17/2011	9:56:30 AM	Main Vac valve closed
2/17/2011	9:56:30 AM	Bypass valve closed
2/17/2011	9:56:30 AM	Bubbler valve closed
2/17/2011	9:56:30 AM	Helium MFC set to  0.000000
2/17/2011	9:56:30 AM	H2 MFC set to  0.000000
2/17/2011	9:56:30 AM	BCl3 MFC set to  0.000000
2/17/2011	9:56:30 AM	PHl3 MFC set to  0.000000
2/17/2011	9:56:30 AM	SiCl4 MFC set to  0.000000
2/17/2011	9:56:30 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	9:56:30 AM	Tube furnace set to 0
2/17/2011	9:56:30 AM	Run finished at 9:56 AM
2/17/2011	9:56:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	10:00:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2011	10:00:54 AM	Recipe started at 10:00 AM
2/17/2011	10:00:54 AM	Helium valve closed
2/17/2011	10:00:54 AM	H2 valve closed
2/17/2011	10:00:54 AM	BCl3 valve closed
2/17/2011	10:00:55 AM	PH3 valve closed
2/17/2011	10:00:55 AM	SiCl4 pre valve closed
2/17/2011	10:00:55 AM	SiCl4 post valve closed
2/17/2011	10:00:55 AM	Main Vac valve closed
2/17/2011	10:00:55 AM	Bubbler valve closed
2/17/2011	10:00:55 AM	Bypass valve opened
2/17/2011	10:00:55 AM	Helium MFC set to  0.000000
2/17/2011	10:00:55 AM	H2 MFC set to  0.000000
2/17/2011	10:00:55 AM	BCl3 MFC set to  0.000000
2/17/2011	10:00:55 AM	PHl3 MFC set to  0.000000
2/17/2011	10:00:55 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:00:55 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:00:55 AM	Tube furnace set to 0
2/17/2011	10:01:25 AM	Helium valve closed
2/17/2011	10:01:25 AM	H2 valve closed
2/17/2011	10:01:25 AM	BCl3 valve closed
2/17/2011	10:01:25 AM	PH3 valve closed
2/17/2011	10:01:25 AM	SiCl4 pre valve closed
2/17/2011	10:01:25 AM	SiCl4 post valve closed
2/17/2011	10:01:25 AM	Bubbler valve closed
2/17/2011	10:01:25 AM	Main Vac valve opened
2/17/2011	10:01:25 AM	Bypass valve opened
2/17/2011	10:01:25 AM	Helium MFC set to  0.000000
2/17/2011	10:01:25 AM	H2 MFC set to  0.000000
2/17/2011	10:01:25 AM	BCl3 MFC set to  0.000000
2/17/2011	10:01:25 AM	PHl3 MFC set to  0.000000
2/17/2011	10:01:25 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:01:25 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:01:26 AM	Tube furnace set to 0
2/17/2011	10:01:26 AM	Run finished at 10:01 AM
2/17/2011	10:01:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2011	10:03:13 AM	Tube furnace set to 300
2/17/2011	10:04:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/17/2011	10:04:55 AM	Recipe started at 10:04 AM
2/17/2011	10:04:55 AM	Helium valve closed
2/17/2011	10:04:55 AM	H2 valve closed
2/17/2011	10:04:55 AM	BCl3 valve closed
2/17/2011	10:04:55 AM	PH3 valve closed
2/17/2011	10:04:55 AM	SiCl4 pre valve closed
2/17/2011	10:04:55 AM	SiCl4 post valve closed
2/17/2011	10:04:55 AM	Main Vac valve closed
2/17/2011	10:04:55 AM	Bubbler valve closed
2/17/2011	10:04:55 AM	Bypass valve opened
2/17/2011	10:04:55 AM	Helium MFC set to  0.000000
2/17/2011	10:04:55 AM	H2 MFC set to  0.000000
2/17/2011	10:04:55 AM	BCl3 MFC set to  0.000000
2/17/2011	10:04:55 AM	PHl3 MFC set to  0.000000
2/17/2011	10:04:55 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:04:55 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:04:55 AM	Tube furnace set to 0
2/17/2011	10:04:56 AM	Helium valve closed
2/17/2011	10:04:56 AM	H2 valve closed
2/17/2011	10:04:56 AM	BCl3 valve closed
2/17/2011	10:04:56 AM	PH3 valve closed
2/17/2011	10:04:56 AM	SiCl4 pre valve closed
2/17/2011	10:04:56 AM	SiCl4 post valve closed
2/17/2011	10:04:56 AM	Bubbler valve closed
2/17/2011	10:04:56 AM	Main Vac valve opened
2/17/2011	10:04:56 AM	Bypass valve opened
2/17/2011	10:04:56 AM	Helium MFC set to  0.000000
2/17/2011	10:04:56 AM	H2 MFC set to  0.000000
2/17/2011	10:04:56 AM	BCl3 MFC set to  0.000000
2/17/2011	10:04:56 AM	PHl3 MFC set to  0.000000
2/17/2011	10:04:56 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:04:56 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:04:56 AM	Tube furnace set to 0
2/17/2011	10:05:56 AM	H2 valve closed
2/17/2011	10:05:56 AM	BCl3 valve closed
2/17/2011	10:05:56 AM	PH3 valve closed
2/17/2011	10:05:56 AM	SiCl4 pre valve closed
2/17/2011	10:05:56 AM	SiCl4 post valve closed
2/17/2011	10:05:56 AM	Bubbler valve closed
2/17/2011	10:05:56 AM	Helium valve opened
2/17/2011	10:05:56 AM	Main Vac valve opened
2/17/2011	10:05:56 AM	Bypass valve opened
2/17/2011	10:05:56 AM	Helium MFC set to  100.000000
2/17/2011	10:05:56 AM	H2 MFC set to  0.000000
2/17/2011	10:05:56 AM	BCl3 MFC set to  0.000000
2/17/2011	10:05:56 AM	PHl3 MFC set to  0.000000
2/17/2011	10:05:56 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:05:56 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:05:56 AM	Tube furnace set to 0
2/17/2011	10:06:56 AM	Helium valve closed
2/17/2011	10:06:56 AM	H2 valve closed
2/17/2011	10:06:56 AM	BCl3 valve closed
2/17/2011	10:06:56 AM	PH3 valve closed
2/17/2011	10:06:56 AM	SiCl4 pre valve closed
2/17/2011	10:06:56 AM	SiCl4 post valve closed
2/17/2011	10:06:56 AM	Bubbler valve closed
2/17/2011	10:06:56 AM	Main Vac valve opened
2/17/2011	10:06:56 AM	Bypass valve opened
2/17/2011	10:06:56 AM	Helium MFC set to  0.000000
2/17/2011	10:06:56 AM	H2 MFC set to  0.000000
2/17/2011	10:06:56 AM	BCl3 MFC set to  0.000000
2/17/2011	10:06:56 AM	PHl3 MFC set to  0.000000
2/17/2011	10:06:56 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:06:56 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:06:56 AM	Tube furnace set to 0
2/17/2011	10:07:56 AM	H2 valve closed
2/17/2011	10:07:56 AM	BCl3 valve closed
2/17/2011	10:07:56 AM	PH3 valve closed
2/17/2011	10:07:56 AM	SiCl4 pre valve closed
2/17/2011	10:07:56 AM	SiCl4 post valve closed
2/17/2011	10:07:56 AM	Bubbler valve closed
2/17/2011	10:07:56 AM	Helium valve opened
2/17/2011	10:07:56 AM	Main Vac valve opened
2/17/2011	10:07:56 AM	Bypass valve opened
2/17/2011	10:07:56 AM	Helium MFC set to  100.000000
2/17/2011	10:07:56 AM	H2 MFC set to  0.000000
2/17/2011	10:07:56 AM	BCl3 MFC set to  0.000000
2/17/2011	10:07:56 AM	PHl3 MFC set to  0.000000
2/17/2011	10:07:56 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:07:56 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:07:57 AM	Tube furnace set to 0
2/17/2011	10:08:57 AM	Helium valve closed
2/17/2011	10:08:57 AM	H2 valve closed
2/17/2011	10:08:57 AM	BCl3 valve closed
2/17/2011	10:08:57 AM	PH3 valve closed
2/17/2011	10:08:57 AM	SiCl4 pre valve closed
2/17/2011	10:08:57 AM	SiCl4 post valve closed
2/17/2011	10:08:57 AM	Bubbler valve closed
2/17/2011	10:08:57 AM	Main Vac valve opened
2/17/2011	10:08:57 AM	Bypass valve opened
2/17/2011	10:08:57 AM	Helium MFC set to  0.000000
2/17/2011	10:08:57 AM	H2 MFC set to  0.000000
2/17/2011	10:08:57 AM	BCl3 MFC set to  0.000000
2/17/2011	10:08:57 AM	PHl3 MFC set to  0.000000
2/17/2011	10:08:57 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:08:57 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:08:57 AM	Tube furnace set to 0
2/17/2011	10:09:57 AM	H2 valve closed
2/17/2011	10:09:57 AM	BCl3 valve closed
2/17/2011	10:09:57 AM	PH3 valve closed
2/17/2011	10:09:57 AM	SiCl4 pre valve closed
2/17/2011	10:09:57 AM	SiCl4 post valve closed
2/17/2011	10:09:57 AM	Bubbler valve closed
2/17/2011	10:09:57 AM	Helium valve opened
2/17/2011	10:09:57 AM	Main Vac valve opened
2/17/2011	10:09:57 AM	Bypass valve opened
2/17/2011	10:09:57 AM	Helium MFC set to  100.000000
2/17/2011	10:09:57 AM	H2 MFC set to  0.000000
2/17/2011	10:09:57 AM	BCl3 MFC set to  0.000000
2/17/2011	10:09:57 AM	PHl3 MFC set to  0.000000
2/17/2011	10:09:57 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:09:57 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:09:57 AM	Tube furnace set to 0
2/17/2011	10:10:57 AM	Helium valve closed
2/17/2011	10:10:57 AM	H2 valve closed
2/17/2011	10:10:57 AM	BCl3 valve closed
2/17/2011	10:10:57 AM	PH3 valve closed
2/17/2011	10:10:57 AM	SiCl4 pre valve closed
2/17/2011	10:10:57 AM	SiCl4 post valve closed
2/17/2011	10:10:57 AM	Bubbler valve closed
2/17/2011	10:10:57 AM	Main Vac valve opened
2/17/2011	10:10:57 AM	Bypass valve opened
2/17/2011	10:10:57 AM	Helium MFC set to  0.000000
2/17/2011	10:10:57 AM	H2 MFC set to  0.000000
2/17/2011	10:10:57 AM	BCl3 MFC set to  0.000000
2/17/2011	10:10:57 AM	PHl3 MFC set to  0.000000
2/17/2011	10:10:57 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:10:57 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:10:57 AM	Tube furnace set to 0
2/17/2011	10:11:57 AM	H2 valve closed
2/17/2011	10:11:57 AM	BCl3 valve closed
2/17/2011	10:11:57 AM	PH3 valve closed
2/17/2011	10:11:57 AM	SiCl4 pre valve closed
2/17/2011	10:11:57 AM	SiCl4 post valve closed
2/17/2011	10:11:57 AM	Bubbler valve closed
2/17/2011	10:11:57 AM	Helium valve opened
2/17/2011	10:11:57 AM	Main Vac valve opened
2/17/2011	10:11:57 AM	Bypass valve opened
2/17/2011	10:11:57 AM	Helium MFC set to  100.000000
2/17/2011	10:11:57 AM	H2 MFC set to  0.000000
2/17/2011	10:11:57 AM	BCl3 MFC set to  0.000000
2/17/2011	10:11:57 AM	PHl3 MFC set to  0.000000
2/17/2011	10:11:57 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:11:57 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:11:57 AM	Tube furnace set to 0
2/17/2011	10:12:57 AM	Helium valve closed
2/17/2011	10:12:57 AM	H2 valve closed
2/17/2011	10:12:57 AM	BCl3 valve closed
2/17/2011	10:12:57 AM	PH3 valve closed
2/17/2011	10:12:57 AM	SiCl4 pre valve closed
2/17/2011	10:12:57 AM	SiCl4 post valve closed
2/17/2011	10:12:57 AM	Bubbler valve closed
2/17/2011	10:12:57 AM	Main Vac valve opened
2/17/2011	10:12:57 AM	Bypass valve opened
2/17/2011	10:12:57 AM	Helium MFC set to  0.000000
2/17/2011	10:12:57 AM	H2 MFC set to  0.000000
2/17/2011	10:12:57 AM	BCl3 MFC set to  0.000000
2/17/2011	10:12:57 AM	PHl3 MFC set to  0.000000
2/17/2011	10:12:57 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:12:57 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:12:58 AM	Tube furnace set to 0
2/17/2011	10:13:58 AM	H2 valve closed
2/17/2011	10:13:58 AM	BCl3 valve closed
2/17/2011	10:13:58 AM	PH3 valve closed
2/17/2011	10:13:58 AM	SiCl4 pre valve closed
2/17/2011	10:13:58 AM	SiCl4 post valve closed
2/17/2011	10:13:58 AM	Bubbler valve closed
2/17/2011	10:13:58 AM	Helium valve opened
2/17/2011	10:13:58 AM	Main Vac valve opened
2/17/2011	10:13:58 AM	Bypass valve opened
2/17/2011	10:13:58 AM	Helium MFC set to  100.000000
2/17/2011	10:13:58 AM	H2 MFC set to  0.000000
2/17/2011	10:13:58 AM	BCl3 MFC set to  0.000000
2/17/2011	10:13:58 AM	PHl3 MFC set to  0.000000
2/17/2011	10:13:58 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:13:58 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:13:58 AM	Tube furnace set to 0
2/17/2011	10:14:58 AM	Helium valve closed
2/17/2011	10:14:58 AM	H2 valve closed
2/17/2011	10:14:58 AM	BCl3 valve closed
2/17/2011	10:14:58 AM	PH3 valve closed
2/17/2011	10:14:58 AM	SiCl4 pre valve closed
2/17/2011	10:14:58 AM	SiCl4 post valve closed
2/17/2011	10:14:58 AM	Bubbler valve closed
2/17/2011	10:14:58 AM	Main Vac valve opened
2/17/2011	10:14:58 AM	Bypass valve opened
2/17/2011	10:14:58 AM	Helium MFC set to  0.000000
2/17/2011	10:14:58 AM	H2 MFC set to  0.000000
2/17/2011	10:14:58 AM	BCl3 MFC set to  0.000000
2/17/2011	10:14:58 AM	PHl3 MFC set to  0.000000
2/17/2011	10:14:58 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:14:58 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:14:58 AM	Tube furnace set to 0
2/17/2011	10:15:58 AM	H2 valve closed
2/17/2011	10:15:58 AM	BCl3 valve closed
2/17/2011	10:15:58 AM	PH3 valve closed
2/17/2011	10:15:58 AM	SiCl4 pre valve closed
2/17/2011	10:15:58 AM	SiCl4 post valve closed
2/17/2011	10:15:58 AM	Bubbler valve closed
2/17/2011	10:15:58 AM	Helium valve opened
2/17/2011	10:15:58 AM	Main Vac valve opened
2/17/2011	10:15:58 AM	Bypass valve opened
2/17/2011	10:15:58 AM	Helium MFC set to  100.000000
2/17/2011	10:15:58 AM	H2 MFC set to  0.000000
2/17/2011	10:15:58 AM	BCl3 MFC set to  0.000000
2/17/2011	10:15:58 AM	PHl3 MFC set to  0.000000
2/17/2011	10:15:58 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:15:58 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:15:58 AM	Tube furnace set to 0
2/17/2011	10:16:58 AM	Helium valve closed
2/17/2011	10:16:58 AM	H2 valve closed
2/17/2011	10:16:58 AM	BCl3 valve closed
2/17/2011	10:16:58 AM	PH3 valve closed
2/17/2011	10:16:58 AM	SiCl4 pre valve closed
2/17/2011	10:16:58 AM	SiCl4 post valve closed
2/17/2011	10:16:58 AM	Bubbler valve closed
2/17/2011	10:16:58 AM	Main Vac valve opened
2/17/2011	10:16:58 AM	Bypass valve opened
2/17/2011	10:16:58 AM	Helium MFC set to  0.000000
2/17/2011	10:16:58 AM	H2 MFC set to  0.000000
2/17/2011	10:16:58 AM	BCl3 MFC set to  0.000000
2/17/2011	10:16:58 AM	PHl3 MFC set to  0.000000
2/17/2011	10:16:58 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:16:58 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:16:58 AM	Tube furnace set to 0
2/17/2011	10:17:58 AM	H2 valve closed
2/17/2011	10:17:58 AM	BCl3 valve closed
2/17/2011	10:17:58 AM	PH3 valve closed
2/17/2011	10:17:58 AM	SiCl4 pre valve closed
2/17/2011	10:17:58 AM	SiCl4 post valve closed
2/17/2011	10:17:58 AM	Bubbler valve closed
2/17/2011	10:17:58 AM	Helium valve opened
2/17/2011	10:17:58 AM	Main Vac valve opened
2/17/2011	10:17:58 AM	Bypass valve opened
2/17/2011	10:17:58 AM	Helium MFC set to  100.000000
2/17/2011	10:17:58 AM	H2 MFC set to  0.000000
2/17/2011	10:17:58 AM	BCl3 MFC set to  0.000000
2/17/2011	10:17:58 AM	PHl3 MFC set to  0.000000
2/17/2011	10:17:58 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:17:58 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:17:58 AM	Tube furnace set to 0
2/17/2011	10:18:59 AM	Helium valve closed
2/17/2011	10:18:59 AM	H2 valve closed
2/17/2011	10:18:59 AM	BCl3 valve closed
2/17/2011	10:18:59 AM	PH3 valve closed
2/17/2011	10:18:59 AM	SiCl4 pre valve closed
2/17/2011	10:18:59 AM	SiCl4 post valve closed
2/17/2011	10:18:59 AM	Bubbler valve closed
2/17/2011	10:18:59 AM	Main Vac valve opened
2/17/2011	10:18:59 AM	Bypass valve opened
2/17/2011	10:18:59 AM	Helium MFC set to  0.000000
2/17/2011	10:18:59 AM	H2 MFC set to  0.000000
2/17/2011	10:18:59 AM	BCl3 MFC set to  0.000000
2/17/2011	10:18:59 AM	PHl3 MFC set to  0.000000
2/17/2011	10:18:59 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:18:59 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:18:59 AM	Tube furnace set to 0
2/17/2011	10:19:59 AM	H2 valve closed
2/17/2011	10:19:59 AM	BCl3 valve closed
2/17/2011	10:19:59 AM	PH3 valve closed
2/17/2011	10:19:59 AM	SiCl4 pre valve closed
2/17/2011	10:19:59 AM	SiCl4 post valve closed
2/17/2011	10:19:59 AM	Bubbler valve closed
2/17/2011	10:19:59 AM	Helium valve opened
2/17/2011	10:19:59 AM	Main Vac valve opened
2/17/2011	10:19:59 AM	Bypass valve opened
2/17/2011	10:19:59 AM	Helium MFC set to  100.000000
2/17/2011	10:19:59 AM	H2 MFC set to  0.000000
2/17/2011	10:19:59 AM	BCl3 MFC set to  0.000000
2/17/2011	10:19:59 AM	PHl3 MFC set to  0.000000
2/17/2011	10:19:59 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:19:59 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:19:59 AM	Tube furnace set to 0
2/17/2011	10:20:59 AM	Helium valve closed
2/17/2011	10:20:59 AM	H2 valve closed
2/17/2011	10:20:59 AM	BCl3 valve closed
2/17/2011	10:20:59 AM	PH3 valve closed
2/17/2011	10:20:59 AM	SiCl4 pre valve closed
2/17/2011	10:20:59 AM	SiCl4 post valve closed
2/17/2011	10:20:59 AM	Bubbler valve closed
2/17/2011	10:20:59 AM	Main Vac valve opened
2/17/2011	10:20:59 AM	Bypass valve opened
2/17/2011	10:20:59 AM	Helium MFC set to  0.000000
2/17/2011	10:20:59 AM	H2 MFC set to  0.000000
2/17/2011	10:20:59 AM	BCl3 MFC set to  0.000000
2/17/2011	10:20:59 AM	PHl3 MFC set to  0.000000
2/17/2011	10:20:59 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:20:59 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:20:59 AM	Tube furnace set to 0
2/17/2011	10:21:59 AM	H2 valve closed
2/17/2011	10:21:59 AM	BCl3 valve closed
2/17/2011	10:21:59 AM	PH3 valve closed
2/17/2011	10:21:59 AM	SiCl4 pre valve closed
2/17/2011	10:21:59 AM	SiCl4 post valve closed
2/17/2011	10:21:59 AM	Bubbler valve closed
2/17/2011	10:21:59 AM	Helium valve opened
2/17/2011	10:21:59 AM	Main Vac valve opened
2/17/2011	10:21:59 AM	Bypass valve opened
2/17/2011	10:21:59 AM	Helium MFC set to  100.000000
2/17/2011	10:21:59 AM	H2 MFC set to  0.000000
2/17/2011	10:21:59 AM	BCl3 MFC set to  0.000000
2/17/2011	10:21:59 AM	PHl3 MFC set to  0.000000
2/17/2011	10:21:59 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:21:59 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:21:59 AM	Tube furnace set to 0
2/17/2011	10:22:59 AM	Helium valve closed
2/17/2011	10:22:59 AM	H2 valve closed
2/17/2011	10:22:59 AM	BCl3 valve closed
2/17/2011	10:22:59 AM	PH3 valve closed
2/17/2011	10:22:59 AM	SiCl4 pre valve closed
2/17/2011	10:22:59 AM	SiCl4 post valve closed
2/17/2011	10:22:59 AM	Bubbler valve closed
2/17/2011	10:22:59 AM	Main Vac valve opened
2/17/2011	10:22:59 AM	Bypass valve opened
2/17/2011	10:22:59 AM	Helium MFC set to  0.000000
2/17/2011	10:22:59 AM	H2 MFC set to  0.000000
2/17/2011	10:22:59 AM	BCl3 MFC set to  0.000000
2/17/2011	10:22:59 AM	PHl3 MFC set to  0.000000
2/17/2011	10:22:59 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:22:59 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:23:00 AM	Tube furnace set to 0
2/17/2011	10:24:00 AM	H2 valve closed
2/17/2011	10:24:00 AM	BCl3 valve closed
2/17/2011	10:24:00 AM	PH3 valve closed
2/17/2011	10:24:00 AM	SiCl4 pre valve closed
2/17/2011	10:24:00 AM	SiCl4 post valve closed
2/17/2011	10:24:00 AM	Bubbler valve closed
2/17/2011	10:24:00 AM	Helium valve opened
2/17/2011	10:24:00 AM	Main Vac valve opened
2/17/2011	10:24:00 AM	Bypass valve opened
2/17/2011	10:24:00 AM	Helium MFC set to  100.000000
2/17/2011	10:24:00 AM	H2 MFC set to  0.000000
2/17/2011	10:24:00 AM	BCl3 MFC set to  0.000000
2/17/2011	10:24:00 AM	PHl3 MFC set to  0.000000
2/17/2011	10:24:00 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:24:00 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:24:00 AM	Tube furnace set to 0
2/17/2011	10:25:00 AM	Helium valve closed
2/17/2011	10:25:00 AM	H2 valve closed
2/17/2011	10:25:00 AM	BCl3 valve closed
2/17/2011	10:25:00 AM	PH3 valve closed
2/17/2011	10:25:00 AM	SiCl4 pre valve closed
2/17/2011	10:25:00 AM	SiCl4 post valve closed
2/17/2011	10:25:00 AM	Bubbler valve closed
2/17/2011	10:25:00 AM	Main Vac valve opened
2/17/2011	10:25:00 AM	Bypass valve opened
2/17/2011	10:25:00 AM	Helium MFC set to  0.000000
2/17/2011	10:25:00 AM	H2 MFC set to  0.000000
2/17/2011	10:25:00 AM	BCl3 MFC set to  0.000000
2/17/2011	10:25:00 AM	PHl3 MFC set to  0.000000
2/17/2011	10:25:00 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:25:00 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:25:00 AM	Tube furnace set to 0
2/17/2011	10:25:01 AM	Run finished at 10:25 AM
2/17/2011	10:25:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/17/2011	10:45:16 AM	Recipe started at 10:45 AM
2/17/2011	10:45:16 AM	Helium valve closed
2/17/2011	10:45:16 AM	BCl3 valve closed
2/17/2011	10:45:16 AM	PH3 valve closed
2/17/2011	10:45:16 AM	SiCl4 pre valve closed
2/17/2011	10:45:16 AM	SiCl4 post valve closed
2/17/2011	10:45:16 AM	Main Vac valve closed
2/17/2011	10:45:16 AM	Bypass valve closed
2/17/2011	10:45:16 AM	Bubbler valve closed
2/17/2011	10:45:16 AM	H2 valve opened
2/17/2011	10:45:16 AM	Helium MFC set to  0.000000
2/17/2011	10:45:16 AM	H2 MFC set to  500.000000
2/17/2011	10:45:16 AM	BCl3 MFC set to  0.000000
2/17/2011	10:45:16 AM	PHl3 MFC set to  0.000000
2/17/2011	10:45:16 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:45:16 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:45:16 AM	Tube furnace set to 0
2/17/2011	10:46:37 AM	Helium valve closed
2/17/2011	10:46:37 AM	BCl3 valve closed
2/17/2011	10:46:37 AM	PH3 valve closed
2/17/2011	10:46:37 AM	SiCl4 pre valve closed
2/17/2011	10:46:37 AM	SiCl4 post valve closed
2/17/2011	10:46:37 AM	Main Vac valve closed
2/17/2011	10:46:37 AM	Bypass valve closed
2/17/2011	10:46:37 AM	H2 valve opened
2/17/2011	10:46:37 AM	Bubbler valve opened
2/17/2011	10:46:37 AM	Helium MFC set to  0.000000
2/17/2011	10:46:37 AM	H2 MFC set to  500.000000
2/17/2011	10:46:37 AM	BCl3 MFC set to  0.000000
2/17/2011	10:46:37 AM	PHl3 MFC set to  0.000000
2/17/2011	10:46:37 AM	SiCl4 MFC set to  0.000000
2/17/2011	10:46:37 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	10:46:37 AM	Tube furnace set to 1000
2/17/2011	11:06:37 AM	Helium valve closed
2/17/2011	11:06:37 AM	BCl3 valve closed
2/17/2011	11:06:37 AM	PH3 valve closed
2/17/2011	11:06:37 AM	Main Vac valve closed
2/17/2011	11:06:37 AM	Bypass valve closed
2/17/2011	11:06:37 AM	H2 valve opened
2/17/2011	11:06:37 AM	SiCl4 pre valve opened
2/17/2011	11:06:37 AM	SiCl4 post valve opened
2/17/2011	11:06:37 AM	Bubbler valve opened
2/17/2011	11:06:37 AM	Helium MFC set to  0.000000
2/17/2011	11:06:37 AM	H2 MFC set to  500.000000
2/17/2011	11:06:37 AM	BCl3 MFC set to  0.000000
2/17/2011	11:06:37 AM	PHl3 MFC set to  0.000000
2/17/2011	11:06:37 AM	SiCl4 MFC set to  50.000000
2/17/2011	11:06:37 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	11:06:37 AM	Tube furnace set to 1000
2/17/2011	11:21:37 AM	H2 valve closed
2/17/2011	11:21:37 AM	BCl3 valve closed
2/17/2011	11:21:37 AM	PH3 valve closed
2/17/2011	11:21:37 AM	SiCl4 pre valve closed
2/17/2011	11:21:37 AM	SiCl4 post valve closed
2/17/2011	11:21:37 AM	Main Vac valve closed
2/17/2011	11:21:37 AM	Bypass valve closed
2/17/2011	11:21:37 AM	Helium valve opened
2/17/2011	11:21:37 AM	Bubbler valve opened
2/17/2011	11:21:37 AM	Helium MFC set to  500.000000
2/17/2011	11:21:37 AM	H2 MFC set to  0.000000
2/17/2011	11:21:37 AM	BCl3 MFC set to  0.000000
2/17/2011	11:21:37 AM	PHl3 MFC set to  0.000000
2/17/2011	11:21:37 AM	SiCl4 MFC set to  0.000000
2/17/2011	11:21:37 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	11:21:37 AM	Tube furnace set to 0
2/17/2011	11:41:38 AM	Helium valve closed
2/17/2011	11:41:38 AM	H2 valve closed
2/17/2011	11:41:38 AM	BCl3 valve closed
2/17/2011	11:41:38 AM	PH3 valve closed
2/17/2011	11:41:38 AM	SiCl4 pre valve closed
2/17/2011	11:41:38 AM	SiCl4 post valve closed
2/17/2011	11:41:38 AM	Main Vac valve closed
2/17/2011	11:41:38 AM	Bypass valve closed
2/17/2011	11:41:38 AM	Bubbler valve closed
2/17/2011	11:41:38 AM	Helium MFC set to  0.000000
2/17/2011	11:41:38 AM	H2 MFC set to  0.000000
2/17/2011	11:41:38 AM	BCl3 MFC set to  0.000000
2/17/2011	11:41:38 AM	PHl3 MFC set to  0.000000
2/17/2011	11:41:38 AM	SiCl4 MFC set to  0.000000
2/17/2011	11:41:38 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	11:41:38 AM	Tube furnace set to 0
2/17/2011	11:41:38 AM	Run finished at 11:41 AM
2/17/2011	11:47:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	11:47:22 AM	Recipe started at 11:47 AM
2/17/2011	11:47:22 AM	H2 valve closed
2/17/2011	11:47:23 AM	BCl3 valve closed
2/17/2011	11:47:23 AM	PH3 valve closed
2/17/2011	11:47:23 AM	SiCl4 pre valve closed
2/17/2011	11:47:23 AM	SiCl4 post valve closed
2/17/2011	11:47:23 AM	Main Vac valve closed
2/17/2011	11:47:23 AM	Bypass valve closed
2/17/2011	11:47:23 AM	Bubbler valve closed
2/17/2011	11:47:23 AM	Helium valve opened
2/17/2011	11:47:23 AM	Helium MFC set to  500.000000
2/17/2011	11:47:23 AM	H2 MFC set to  0.000000
2/17/2011	11:47:23 AM	BCl3 MFC set to  0.000000
2/17/2011	11:47:23 AM	PHl3 MFC set to  0.000000
2/17/2011	11:47:23 AM	SiCl4 MFC set to  0.000000
2/17/2011	11:47:23 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	11:47:23 AM	Tube furnace set to 0
2/17/2011	11:47:25 AM	Helium valve closed
2/17/2011	11:47:25 AM	H2 valve closed
2/17/2011	11:47:25 AM	BCl3 valve closed
2/17/2011	11:47:25 AM	PH3 valve closed
2/17/2011	11:47:25 AM	SiCl4 pre valve closed
2/17/2011	11:47:25 AM	SiCl4 post valve closed
2/17/2011	11:47:25 AM	Main Vac valve closed
2/17/2011	11:47:25 AM	Bypass valve closed
2/17/2011	11:47:25 AM	Bubbler valve closed
2/17/2011	11:47:25 AM	Helium MFC set to  0.000000
2/17/2011	11:47:25 AM	H2 MFC set to  0.000000
2/17/2011	11:47:25 AM	BCl3 MFC set to  0.000000
2/17/2011	11:47:25 AM	PHl3 MFC set to  0.000000
2/17/2011	11:47:25 AM	SiCl4 MFC set to  0.000000
2/17/2011	11:47:25 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	11:47:25 AM	Tube furnace set to 0
2/17/2011	11:47:25 AM	Run finished at 11:47 AM
2/17/2011	11:47:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	11:49:36 AM	Bypass valve opened
2/17/2011	11:49:38 AM	Bypass valve closed
2/17/2011	11:49:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	11:49:53 AM	Recipe started at 11:49 AM
2/17/2011	11:49:53 AM	H2 valve closed
2/17/2011	11:49:53 AM	BCl3 valve closed
2/17/2011	11:49:53 AM	PH3 valve closed
2/17/2011	11:49:53 AM	SiCl4 pre valve closed
2/17/2011	11:49:53 AM	SiCl4 post valve closed
2/17/2011	11:49:53 AM	Main Vac valve closed
2/17/2011	11:49:53 AM	Bypass valve closed
2/17/2011	11:49:53 AM	Bubbler valve closed
2/17/2011	11:49:53 AM	Helium valve opened
2/17/2011	11:49:53 AM	Helium MFC set to  500.000000
2/17/2011	11:49:53 AM	H2 MFC set to  0.000000
2/17/2011	11:49:53 AM	BCl3 MFC set to  0.000000
2/17/2011	11:49:53 AM	PHl3 MFC set to  0.000000
2/17/2011	11:49:53 AM	SiCl4 MFC set to  0.000000
2/17/2011	11:49:53 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	11:49:53 AM	Tube furnace set to 0
2/17/2011	11:50:21 AM	Helium valve closed
2/17/2011	11:50:21 AM	H2 valve closed
2/17/2011	11:50:21 AM	BCl3 valve closed
2/17/2011	11:50:21 AM	PH3 valve closed
2/17/2011	11:50:21 AM	SiCl4 pre valve closed
2/17/2011	11:50:21 AM	SiCl4 post valve closed
2/17/2011	11:50:21 AM	Main Vac valve closed
2/17/2011	11:50:21 AM	Bypass valve closed
2/17/2011	11:50:21 AM	Bubbler valve closed
2/17/2011	11:50:21 AM	Helium MFC set to  0.000000
2/17/2011	11:50:21 AM	H2 MFC set to  0.000000
2/17/2011	11:50:21 AM	BCl3 MFC set to  0.000000
2/17/2011	11:50:21 AM	PHl3 MFC set to  0.000000
2/17/2011	11:50:21 AM	SiCl4 MFC set to  0.000000
2/17/2011	11:50:21 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	11:50:22 AM	Tube furnace set to 0
2/17/2011	11:50:22 AM	Run finished at 11:50 AM
2/17/2011	11:50:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	11:58:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2011	11:58:30 AM	Recipe started at 11:58 AM
2/17/2011	11:58:30 AM	Helium valve closed
2/17/2011	11:58:30 AM	H2 valve closed
2/17/2011	11:58:30 AM	BCl3 valve closed
2/17/2011	11:58:30 AM	PH3 valve closed
2/17/2011	11:58:30 AM	SiCl4 pre valve closed
2/17/2011	11:58:30 AM	SiCl4 post valve closed
2/17/2011	11:58:30 AM	Main Vac valve closed
2/17/2011	11:58:30 AM	Bubbler valve closed
2/17/2011	11:58:30 AM	Bypass valve opened
2/17/2011	11:58:30 AM	Helium MFC set to  0.000000
2/17/2011	11:58:30 AM	H2 MFC set to  0.000000
2/17/2011	11:58:30 AM	BCl3 MFC set to  0.000000
2/17/2011	11:58:30 AM	PHl3 MFC set to  0.000000
2/17/2011	11:58:30 AM	SiCl4 MFC set to  0.000000
2/17/2011	11:58:30 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	11:58:31 AM	Tube furnace set to 0
2/17/2011	11:59:02 AM	Helium valve closed
2/17/2011	11:59:02 AM	H2 valve closed
2/17/2011	11:59:02 AM	BCl3 valve closed
2/17/2011	11:59:02 AM	PH3 valve closed
2/17/2011	11:59:02 AM	SiCl4 pre valve closed
2/17/2011	11:59:02 AM	SiCl4 post valve closed
2/17/2011	11:59:02 AM	Bubbler valve closed
2/17/2011	11:59:02 AM	Main Vac valve opened
2/17/2011	11:59:02 AM	Bypass valve opened
2/17/2011	11:59:02 AM	Helium MFC set to  0.000000
2/17/2011	11:59:02 AM	H2 MFC set to  0.000000
2/17/2011	11:59:02 AM	BCl3 MFC set to  0.000000
2/17/2011	11:59:02 AM	PHl3 MFC set to  0.000000
2/17/2011	11:59:02 AM	SiCl4 MFC set to  0.000000
2/17/2011	11:59:02 AM	Bypass solenoid MFC set to  0.000000
2/17/2011	11:59:02 AM	Tube furnace set to 0
2/17/2011	11:59:03 AM	Run finished at 11:59 AM
2/17/2011	11:59:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2011	12:00:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/17/2011	12:01:08 PM	Recipe started at 12:01 PM
2/17/2011	12:01:08 PM	Helium valve closed
2/17/2011	12:01:08 PM	H2 valve closed
2/17/2011	12:01:08 PM	BCl3 valve closed
2/17/2011	12:01:08 PM	PH3 valve closed
2/17/2011	12:01:08 PM	SiCl4 pre valve closed
2/17/2011	12:01:08 PM	SiCl4 post valve closed
2/17/2011	12:01:08 PM	Main Vac valve closed
2/17/2011	12:01:08 PM	Bubbler valve closed
2/17/2011	12:01:08 PM	Bypass valve opened
2/17/2011	12:01:08 PM	Helium MFC set to  0.000000
2/17/2011	12:01:08 PM	H2 MFC set to  0.000000
2/17/2011	12:01:08 PM	BCl3 MFC set to  0.000000
2/17/2011	12:01:08 PM	PHl3 MFC set to  0.000000
2/17/2011	12:01:08 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:01:08 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:01:08 PM	Tube furnace set to 0
2/17/2011	12:01:08 PM	Helium valve closed
2/17/2011	12:01:08 PM	H2 valve closed
2/17/2011	12:01:08 PM	BCl3 valve closed
2/17/2011	12:01:08 PM	PH3 valve closed
2/17/2011	12:01:08 PM	SiCl4 pre valve closed
2/17/2011	12:01:08 PM	SiCl4 post valve closed
2/17/2011	12:01:09 PM	Bubbler valve closed
2/17/2011	12:01:09 PM	Main Vac valve opened
2/17/2011	12:01:09 PM	Bypass valve opened
2/17/2011	12:01:09 PM	Helium MFC set to  0.000000
2/17/2011	12:01:09 PM	H2 MFC set to  0.000000
2/17/2011	12:01:09 PM	BCl3 MFC set to  0.000000
2/17/2011	12:01:09 PM	PHl3 MFC set to  0.000000
2/17/2011	12:01:09 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:01:09 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:01:09 PM	Tube furnace set to 0
2/17/2011	12:02:09 PM	H2 valve closed
2/17/2011	12:02:09 PM	BCl3 valve closed
2/17/2011	12:02:09 PM	PH3 valve closed
2/17/2011	12:02:09 PM	SiCl4 pre valve closed
2/17/2011	12:02:09 PM	SiCl4 post valve closed
2/17/2011	12:02:09 PM	Bubbler valve closed
2/17/2011	12:02:09 PM	Helium valve opened
2/17/2011	12:02:09 PM	Main Vac valve opened
2/17/2011	12:02:09 PM	Bypass valve opened
2/17/2011	12:02:09 PM	Helium MFC set to  100.000000
2/17/2011	12:02:09 PM	H2 MFC set to  0.000000
2/17/2011	12:02:09 PM	BCl3 MFC set to  0.000000
2/17/2011	12:02:09 PM	PHl3 MFC set to  0.000000
2/17/2011	12:02:09 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:02:09 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:02:09 PM	Tube furnace set to 0
2/17/2011	12:03:09 PM	Helium valve closed
2/17/2011	12:03:09 PM	H2 valve closed
2/17/2011	12:03:09 PM	BCl3 valve closed
2/17/2011	12:03:09 PM	PH3 valve closed
2/17/2011	12:03:09 PM	SiCl4 pre valve closed
2/17/2011	12:03:09 PM	SiCl4 post valve closed
2/17/2011	12:03:09 PM	Bubbler valve closed
2/17/2011	12:03:09 PM	Main Vac valve opened
2/17/2011	12:03:09 PM	Bypass valve opened
2/17/2011	12:03:09 PM	Helium MFC set to  0.000000
2/17/2011	12:03:09 PM	H2 MFC set to  0.000000
2/17/2011	12:03:09 PM	BCl3 MFC set to  0.000000
2/17/2011	12:03:09 PM	PHl3 MFC set to  0.000000
2/17/2011	12:03:09 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:03:09 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:03:09 PM	Tube furnace set to 0
2/17/2011	12:04:09 PM	H2 valve closed
2/17/2011	12:04:09 PM	BCl3 valve closed
2/17/2011	12:04:09 PM	PH3 valve closed
2/17/2011	12:04:09 PM	SiCl4 pre valve closed
2/17/2011	12:04:09 PM	SiCl4 post valve closed
2/17/2011	12:04:09 PM	Bubbler valve closed
2/17/2011	12:04:09 PM	Helium valve opened
2/17/2011	12:04:09 PM	Main Vac valve opened
2/17/2011	12:04:09 PM	Bypass valve opened
2/17/2011	12:04:09 PM	Helium MFC set to  100.000000
2/17/2011	12:04:09 PM	H2 MFC set to  0.000000
2/17/2011	12:04:09 PM	BCl3 MFC set to  0.000000
2/17/2011	12:04:09 PM	PHl3 MFC set to  0.000000
2/17/2011	12:04:09 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:04:09 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:04:09 PM	Tube furnace set to 0
2/17/2011	12:05:09 PM	Helium valve closed
2/17/2011	12:05:09 PM	H2 valve closed
2/17/2011	12:05:09 PM	BCl3 valve closed
2/17/2011	12:05:09 PM	PH3 valve closed
2/17/2011	12:05:09 PM	SiCl4 pre valve closed
2/17/2011	12:05:09 PM	SiCl4 post valve closed
2/17/2011	12:05:09 PM	Bubbler valve closed
2/17/2011	12:05:09 PM	Main Vac valve opened
2/17/2011	12:05:09 PM	Bypass valve opened
2/17/2011	12:05:09 PM	Helium MFC set to  0.000000
2/17/2011	12:05:09 PM	H2 MFC set to  0.000000
2/17/2011	12:05:09 PM	BCl3 MFC set to  0.000000
2/17/2011	12:05:09 PM	PHl3 MFC set to  0.000000
2/17/2011	12:05:09 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:05:09 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:05:09 PM	Tube furnace set to 0
2/17/2011	12:06:09 PM	H2 valve closed
2/17/2011	12:06:09 PM	BCl3 valve closed
2/17/2011	12:06:09 PM	PH3 valve closed
2/17/2011	12:06:09 PM	SiCl4 pre valve closed
2/17/2011	12:06:09 PM	SiCl4 post valve closed
2/17/2011	12:06:09 PM	Bubbler valve closed
2/17/2011	12:06:10 PM	Helium valve opened
2/17/2011	12:06:10 PM	Main Vac valve opened
2/17/2011	12:06:10 PM	Bypass valve opened
2/17/2011	12:06:10 PM	Helium MFC set to  100.000000
2/17/2011	12:06:10 PM	H2 MFC set to  0.000000
2/17/2011	12:06:10 PM	BCl3 MFC set to  0.000000
2/17/2011	12:06:10 PM	PHl3 MFC set to  0.000000
2/17/2011	12:06:10 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:06:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:06:10 PM	Tube furnace set to 0
2/17/2011	12:07:10 PM	Helium valve closed
2/17/2011	12:07:10 PM	H2 valve closed
2/17/2011	12:07:10 PM	BCl3 valve closed
2/17/2011	12:07:10 PM	PH3 valve closed
2/17/2011	12:07:10 PM	SiCl4 pre valve closed
2/17/2011	12:07:10 PM	SiCl4 post valve closed
2/17/2011	12:07:10 PM	Bubbler valve closed
2/17/2011	12:07:10 PM	Main Vac valve opened
2/17/2011	12:07:10 PM	Bypass valve opened
2/17/2011	12:07:10 PM	Helium MFC set to  0.000000
2/17/2011	12:07:10 PM	H2 MFC set to  0.000000
2/17/2011	12:07:10 PM	BCl3 MFC set to  0.000000
2/17/2011	12:07:10 PM	PHl3 MFC set to  0.000000
2/17/2011	12:07:10 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:07:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:07:10 PM	Tube furnace set to 0
2/17/2011	12:08:10 PM	H2 valve closed
2/17/2011	12:08:10 PM	BCl3 valve closed
2/17/2011	12:08:10 PM	PH3 valve closed
2/17/2011	12:08:10 PM	SiCl4 pre valve closed
2/17/2011	12:08:10 PM	SiCl4 post valve closed
2/17/2011	12:08:10 PM	Bubbler valve closed
2/17/2011	12:08:10 PM	Helium valve opened
2/17/2011	12:08:10 PM	Main Vac valve opened
2/17/2011	12:08:10 PM	Bypass valve opened
2/17/2011	12:08:10 PM	Helium MFC set to  100.000000
2/17/2011	12:08:10 PM	H2 MFC set to  0.000000
2/17/2011	12:08:10 PM	BCl3 MFC set to  0.000000
2/17/2011	12:08:10 PM	PHl3 MFC set to  0.000000
2/17/2011	12:08:10 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:08:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:08:10 PM	Tube furnace set to 0
2/17/2011	12:09:10 PM	Helium valve closed
2/17/2011	12:09:10 PM	H2 valve closed
2/17/2011	12:09:10 PM	BCl3 valve closed
2/17/2011	12:09:10 PM	PH3 valve closed
2/17/2011	12:09:10 PM	SiCl4 pre valve closed
2/17/2011	12:09:10 PM	SiCl4 post valve closed
2/17/2011	12:09:10 PM	Bubbler valve closed
2/17/2011	12:09:10 PM	Main Vac valve opened
2/17/2011	12:09:10 PM	Bypass valve opened
2/17/2011	12:09:10 PM	Helium MFC set to  0.000000
2/17/2011	12:09:10 PM	H2 MFC set to  0.000000
2/17/2011	12:09:10 PM	BCl3 MFC set to  0.000000
2/17/2011	12:09:10 PM	PHl3 MFC set to  0.000000
2/17/2011	12:09:10 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:09:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:09:10 PM	Tube furnace set to 0
2/17/2011	12:10:10 PM	H2 valve closed
2/17/2011	12:10:10 PM	BCl3 valve closed
2/17/2011	12:10:10 PM	PH3 valve closed
2/17/2011	12:10:10 PM	SiCl4 pre valve closed
2/17/2011	12:10:10 PM	SiCl4 post valve closed
2/17/2011	12:10:10 PM	Bubbler valve closed
2/17/2011	12:10:10 PM	Helium valve opened
2/17/2011	12:10:10 PM	Main Vac valve opened
2/17/2011	12:10:10 PM	Bypass valve opened
2/17/2011	12:10:10 PM	Helium MFC set to  100.000000
2/17/2011	12:10:10 PM	H2 MFC set to  0.000000
2/17/2011	12:10:10 PM	BCl3 MFC set to  0.000000
2/17/2011	12:10:10 PM	PHl3 MFC set to  0.000000
2/17/2011	12:10:10 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:10:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:10:10 PM	Tube furnace set to 0
2/17/2011	12:11:10 PM	Helium valve closed
2/17/2011	12:11:10 PM	H2 valve closed
2/17/2011	12:11:10 PM	BCl3 valve closed
2/17/2011	12:11:10 PM	PH3 valve closed
2/17/2011	12:11:10 PM	SiCl4 pre valve closed
2/17/2011	12:11:10 PM	SiCl4 post valve closed
2/17/2011	12:11:10 PM	Bubbler valve closed
2/17/2011	12:11:10 PM	Main Vac valve opened
2/17/2011	12:11:10 PM	Bypass valve opened
2/17/2011	12:11:10 PM	Helium MFC set to  0.000000
2/17/2011	12:11:10 PM	H2 MFC set to  0.000000
2/17/2011	12:11:10 PM	BCl3 MFC set to  0.000000
2/17/2011	12:11:10 PM	PHl3 MFC set to  0.000000
2/17/2011	12:11:10 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:11:10 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:11:11 PM	Tube furnace set to 0
2/17/2011	12:12:11 PM	H2 valve closed
2/17/2011	12:12:11 PM	BCl3 valve closed
2/17/2011	12:12:11 PM	PH3 valve closed
2/17/2011	12:12:11 PM	SiCl4 pre valve closed
2/17/2011	12:12:11 PM	SiCl4 post valve closed
2/17/2011	12:12:11 PM	Bubbler valve closed
2/17/2011	12:12:11 PM	Helium valve opened
2/17/2011	12:12:11 PM	Main Vac valve opened
2/17/2011	12:12:11 PM	Bypass valve opened
2/17/2011	12:12:11 PM	Helium MFC set to  100.000000
2/17/2011	12:12:11 PM	H2 MFC set to  0.000000
2/17/2011	12:12:11 PM	BCl3 MFC set to  0.000000
2/17/2011	12:12:11 PM	PHl3 MFC set to  0.000000
2/17/2011	12:12:11 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:12:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:12:11 PM	Tube furnace set to 0
2/17/2011	12:13:11 PM	Helium valve closed
2/17/2011	12:13:11 PM	H2 valve closed
2/17/2011	12:13:11 PM	BCl3 valve closed
2/17/2011	12:13:11 PM	PH3 valve closed
2/17/2011	12:13:11 PM	SiCl4 pre valve closed
2/17/2011	12:13:11 PM	SiCl4 post valve closed
2/17/2011	12:13:11 PM	Bubbler valve closed
2/17/2011	12:13:11 PM	Main Vac valve opened
2/17/2011	12:13:11 PM	Bypass valve opened
2/17/2011	12:13:11 PM	Helium MFC set to  0.000000
2/17/2011	12:13:11 PM	H2 MFC set to  0.000000
2/17/2011	12:13:11 PM	BCl3 MFC set to  0.000000
2/17/2011	12:13:11 PM	PHl3 MFC set to  0.000000
2/17/2011	12:13:11 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:13:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:13:11 PM	Tube furnace set to 0
2/17/2011	12:14:11 PM	H2 valve closed
2/17/2011	12:14:11 PM	BCl3 valve closed
2/17/2011	12:14:11 PM	PH3 valve closed
2/17/2011	12:14:11 PM	SiCl4 pre valve closed
2/17/2011	12:14:11 PM	SiCl4 post valve closed
2/17/2011	12:14:11 PM	Bubbler valve closed
2/17/2011	12:14:11 PM	Helium valve opened
2/17/2011	12:14:11 PM	Main Vac valve opened
2/17/2011	12:14:11 PM	Bypass valve opened
2/17/2011	12:14:11 PM	Helium MFC set to  100.000000
2/17/2011	12:14:11 PM	H2 MFC set to  0.000000
2/17/2011	12:14:11 PM	BCl3 MFC set to  0.000000
2/17/2011	12:14:11 PM	PHl3 MFC set to  0.000000
2/17/2011	12:14:11 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:14:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:14:11 PM	Tube furnace set to 0
2/17/2011	12:15:11 PM	Helium valve closed
2/17/2011	12:15:11 PM	H2 valve closed
2/17/2011	12:15:11 PM	BCl3 valve closed
2/17/2011	12:15:11 PM	PH3 valve closed
2/17/2011	12:15:11 PM	SiCl4 pre valve closed
2/17/2011	12:15:11 PM	SiCl4 post valve closed
2/17/2011	12:15:11 PM	Bubbler valve closed
2/17/2011	12:15:11 PM	Main Vac valve opened
2/17/2011	12:15:11 PM	Bypass valve opened
2/17/2011	12:15:11 PM	Helium MFC set to  0.000000
2/17/2011	12:15:11 PM	H2 MFC set to  0.000000
2/17/2011	12:15:11 PM	BCl3 MFC set to  0.000000
2/17/2011	12:15:11 PM	PHl3 MFC set to  0.000000
2/17/2011	12:15:11 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:15:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:15:11 PM	Tube furnace set to 0
2/17/2011	12:16:11 PM	H2 valve closed
2/17/2011	12:16:11 PM	BCl3 valve closed
2/17/2011	12:16:11 PM	PH3 valve closed
2/17/2011	12:16:11 PM	SiCl4 pre valve closed
2/17/2011	12:16:11 PM	SiCl4 post valve closed
2/17/2011	12:16:11 PM	Bubbler valve closed
2/17/2011	12:16:11 PM	Helium valve opened
2/17/2011	12:16:11 PM	Main Vac valve opened
2/17/2011	12:16:11 PM	Bypass valve opened
2/17/2011	12:16:11 PM	Helium MFC set to  100.000000
2/17/2011	12:16:11 PM	H2 MFC set to  0.000000
2/17/2011	12:16:11 PM	BCl3 MFC set to  0.000000
2/17/2011	12:16:11 PM	PHl3 MFC set to  0.000000
2/17/2011	12:16:11 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:16:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:16:12 PM	Tube furnace set to 0
2/17/2011	12:17:12 PM	Helium valve closed
2/17/2011	12:17:12 PM	H2 valve closed
2/17/2011	12:17:12 PM	BCl3 valve closed
2/17/2011	12:17:12 PM	PH3 valve closed
2/17/2011	12:17:12 PM	SiCl4 pre valve closed
2/17/2011	12:17:12 PM	SiCl4 post valve closed
2/17/2011	12:17:12 PM	Bubbler valve closed
2/17/2011	12:17:12 PM	Main Vac valve opened
2/17/2011	12:17:12 PM	Bypass valve opened
2/17/2011	12:17:12 PM	Helium MFC set to  0.000000
2/17/2011	12:17:12 PM	H2 MFC set to  0.000000
2/17/2011	12:17:12 PM	BCl3 MFC set to  0.000000
2/17/2011	12:17:12 PM	PHl3 MFC set to  0.000000
2/17/2011	12:17:12 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:17:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:17:12 PM	Tube furnace set to 0
2/17/2011	12:18:12 PM	H2 valve closed
2/17/2011	12:18:12 PM	BCl3 valve closed
2/17/2011	12:18:12 PM	PH3 valve closed
2/17/2011	12:18:12 PM	SiCl4 pre valve closed
2/17/2011	12:18:12 PM	SiCl4 post valve closed
2/17/2011	12:18:12 PM	Bubbler valve closed
2/17/2011	12:18:12 PM	Helium valve opened
2/17/2011	12:18:12 PM	Main Vac valve opened
2/17/2011	12:18:12 PM	Bypass valve opened
2/17/2011	12:18:12 PM	Helium MFC set to  100.000000
2/17/2011	12:18:12 PM	H2 MFC set to  0.000000
2/17/2011	12:18:12 PM	BCl3 MFC set to  0.000000
2/17/2011	12:18:12 PM	PHl3 MFC set to  0.000000
2/17/2011	12:18:12 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:18:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:18:12 PM	Tube furnace set to 0
2/17/2011	12:19:12 PM	Helium valve closed
2/17/2011	12:19:12 PM	H2 valve closed
2/17/2011	12:19:12 PM	BCl3 valve closed
2/17/2011	12:19:12 PM	PH3 valve closed
2/17/2011	12:19:12 PM	SiCl4 pre valve closed
2/17/2011	12:19:12 PM	SiCl4 post valve closed
2/17/2011	12:19:12 PM	Bubbler valve closed
2/17/2011	12:19:12 PM	Main Vac valve opened
2/17/2011	12:19:12 PM	Bypass valve opened
2/17/2011	12:19:12 PM	Helium MFC set to  0.000000
2/17/2011	12:19:12 PM	H2 MFC set to  0.000000
2/17/2011	12:19:12 PM	BCl3 MFC set to  0.000000
2/17/2011	12:19:12 PM	PHl3 MFC set to  0.000000
2/17/2011	12:19:12 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:19:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:19:12 PM	Tube furnace set to 0
2/17/2011	12:20:12 PM	H2 valve closed
2/17/2011	12:20:12 PM	BCl3 valve closed
2/17/2011	12:20:12 PM	PH3 valve closed
2/17/2011	12:20:12 PM	SiCl4 pre valve closed
2/17/2011	12:20:12 PM	SiCl4 post valve closed
2/17/2011	12:20:12 PM	Bubbler valve closed
2/17/2011	12:20:12 PM	Helium valve opened
2/17/2011	12:20:12 PM	Main Vac valve opened
2/17/2011	12:20:12 PM	Bypass valve opened
2/17/2011	12:20:12 PM	Helium MFC set to  100.000000
2/17/2011	12:20:12 PM	H2 MFC set to  0.000000
2/17/2011	12:20:12 PM	BCl3 MFC set to  0.000000
2/17/2011	12:20:12 PM	PHl3 MFC set to  0.000000
2/17/2011	12:20:12 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:20:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:20:12 PM	Tube furnace set to 0
2/17/2011	12:21:12 PM	Helium valve closed
2/17/2011	12:21:12 PM	H2 valve closed
2/17/2011	12:21:12 PM	BCl3 valve closed
2/17/2011	12:21:12 PM	PH3 valve closed
2/17/2011	12:21:12 PM	SiCl4 pre valve closed
2/17/2011	12:21:12 PM	SiCl4 post valve closed
2/17/2011	12:21:12 PM	Bubbler valve closed
2/17/2011	12:21:12 PM	Main Vac valve opened
2/17/2011	12:21:12 PM	Bypass valve opened
2/17/2011	12:21:12 PM	Helium MFC set to  0.000000
2/17/2011	12:21:12 PM	H2 MFC set to  0.000000
2/17/2011	12:21:12 PM	BCl3 MFC set to  0.000000
2/17/2011	12:21:12 PM	PHl3 MFC set to  0.000000
2/17/2011	12:21:12 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:21:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:21:13 PM	Tube furnace set to 0
2/17/2011	12:21:14 PM	Run finished at 12:21 PM
2/17/2011	12:21:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/17/2011	12:24:09 PM	Recipe started at 12:24 PM
2/17/2011	12:24:09 PM	Helium valve closed
2/17/2011	12:24:09 PM	BCl3 valve closed
2/17/2011	12:24:09 PM	PH3 valve closed
2/17/2011	12:24:09 PM	SiCl4 pre valve closed
2/17/2011	12:24:09 PM	SiCl4 post valve closed
2/17/2011	12:24:09 PM	Main Vac valve closed
2/17/2011	12:24:09 PM	Bypass valve closed
2/17/2011	12:24:09 PM	Bubbler valve closed
2/17/2011	12:24:09 PM	H2 valve opened
2/17/2011	12:24:09 PM	Helium MFC set to  0.000000
2/17/2011	12:24:09 PM	H2 MFC set to  500.000000
2/17/2011	12:24:09 PM	BCl3 MFC set to  0.000000
2/17/2011	12:24:09 PM	PHl3 MFC set to  0.000000
2/17/2011	12:24:09 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:24:09 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:24:09 PM	Tube furnace set to 0
2/17/2011	12:25:27 PM	Helium valve closed
2/17/2011	12:25:27 PM	BCl3 valve closed
2/17/2011	12:25:27 PM	PH3 valve closed
2/17/2011	12:25:27 PM	SiCl4 pre valve closed
2/17/2011	12:25:27 PM	SiCl4 post valve closed
2/17/2011	12:25:27 PM	Main Vac valve closed
2/17/2011	12:25:27 PM	Bypass valve closed
2/17/2011	12:25:27 PM	H2 valve opened
2/17/2011	12:25:27 PM	Bubbler valve opened
2/17/2011	12:25:27 PM	Helium MFC set to  0.000000
2/17/2011	12:25:27 PM	H2 MFC set to  500.000000
2/17/2011	12:25:27 PM	BCl3 MFC set to  0.000000
2/17/2011	12:25:27 PM	PHl3 MFC set to  0.000000
2/17/2011	12:25:27 PM	SiCl4 MFC set to  0.000000
2/17/2011	12:25:27 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:25:27 PM	Tube furnace set to 1000
2/17/2011	12:45:27 PM	Helium valve closed
2/17/2011	12:45:27 PM	BCl3 valve closed
2/17/2011	12:45:27 PM	PH3 valve closed
2/17/2011	12:45:27 PM	Main Vac valve closed
2/17/2011	12:45:27 PM	Bypass valve closed
2/17/2011	12:45:27 PM	H2 valve opened
2/17/2011	12:45:27 PM	SiCl4 pre valve opened
2/17/2011	12:45:27 PM	SiCl4 post valve opened
2/17/2011	12:45:27 PM	Bubbler valve opened
2/17/2011	12:45:27 PM	Helium MFC set to  0.000000
2/17/2011	12:45:27 PM	H2 MFC set to  250.000000
2/17/2011	12:45:27 PM	BCl3 MFC set to  0.000000
2/17/2011	12:45:27 PM	PHl3 MFC set to  0.000000
2/17/2011	12:45:27 PM	SiCl4 MFC set to  25.000000
2/17/2011	12:45:27 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	12:45:28 PM	Tube furnace set to 1000
2/17/2011	1:00:28 PM	H2 valve closed
2/17/2011	1:00:28 PM	BCl3 valve closed
2/17/2011	1:00:28 PM	PH3 valve closed
2/17/2011	1:00:28 PM	SiCl4 pre valve closed
2/17/2011	1:00:28 PM	SiCl4 post valve closed
2/17/2011	1:00:28 PM	Main Vac valve closed
2/17/2011	1:00:28 PM	Bypass valve closed
2/17/2011	1:00:28 PM	Helium valve opened
2/17/2011	1:00:28 PM	Bubbler valve opened
2/17/2011	1:00:28 PM	Helium MFC set to  500.000000
2/17/2011	1:00:28 PM	H2 MFC set to  0.000000
2/17/2011	1:00:28 PM	BCl3 MFC set to  0.000000
2/17/2011	1:00:28 PM	PHl3 MFC set to  0.000000
2/17/2011	1:00:28 PM	SiCl4 MFC set to  0.000000
2/17/2011	1:00:28 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	1:00:28 PM	Tube furnace set to 0
2/17/2011	1:20:28 PM	Helium valve closed
2/17/2011	1:20:28 PM	H2 valve closed
2/17/2011	1:20:28 PM	BCl3 valve closed
2/17/2011	1:20:28 PM	PH3 valve closed
2/17/2011	1:20:28 PM	SiCl4 pre valve closed
2/17/2011	1:20:28 PM	SiCl4 post valve closed
2/17/2011	1:20:28 PM	Main Vac valve closed
2/17/2011	1:20:28 PM	Bypass valve closed
2/17/2011	1:20:28 PM	Bubbler valve closed
2/17/2011	1:20:28 PM	Helium MFC set to  0.000000
2/17/2011	1:20:28 PM	H2 MFC set to  0.000000
2/17/2011	1:20:28 PM	BCl3 MFC set to  0.000000
2/17/2011	1:20:28 PM	PHl3 MFC set to  0.000000
2/17/2011	1:20:28 PM	SiCl4 MFC set to  0.000000
2/17/2011	1:20:28 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	1:20:28 PM	Tube furnace set to 0
2/17/2011	1:20:28 PM	Run finished at 1:20 PM
2/17/2011	1:28:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	1:28:11 PM	Recipe started at 1:28 PM
2/17/2011	1:28:11 PM	H2 valve closed
2/17/2011	1:28:11 PM	BCl3 valve closed
2/17/2011	1:28:11 PM	PH3 valve closed
2/17/2011	1:28:11 PM	SiCl4 pre valve closed
2/17/2011	1:28:11 PM	SiCl4 post valve closed
2/17/2011	1:28:11 PM	Main Vac valve closed
2/17/2011	1:28:11 PM	Bypass valve closed
2/17/2011	1:28:11 PM	Bubbler valve closed
2/17/2011	1:28:11 PM	Helium valve opened
2/17/2011	1:28:11 PM	Helium MFC set to  500.000000
2/17/2011	1:28:11 PM	H2 MFC set to  0.000000
2/17/2011	1:28:11 PM	BCl3 MFC set to  0.000000
2/17/2011	1:28:11 PM	PHl3 MFC set to  0.000000
2/17/2011	1:28:11 PM	SiCl4 MFC set to  0.000000
2/17/2011	1:28:11 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	1:28:11 PM	Tube furnace set to 0
2/17/2011	1:28:12 PM	Helium valve closed
2/17/2011	1:28:12 PM	H2 valve closed
2/17/2011	1:28:12 PM	BCl3 valve closed
2/17/2011	1:28:12 PM	PH3 valve closed
2/17/2011	1:28:12 PM	SiCl4 pre valve closed
2/17/2011	1:28:12 PM	SiCl4 post valve closed
2/17/2011	1:28:12 PM	Main Vac valve closed
2/17/2011	1:28:12 PM	Bypass valve closed
2/17/2011	1:28:12 PM	Bubbler valve closed
2/17/2011	1:28:12 PM	Helium MFC set to  0.000000
2/17/2011	1:28:12 PM	H2 MFC set to  0.000000
2/17/2011	1:28:12 PM	BCl3 MFC set to  0.000000
2/17/2011	1:28:12 PM	PHl3 MFC set to  0.000000
2/17/2011	1:28:12 PM	SiCl4 MFC set to  0.000000
2/17/2011	1:28:12 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	1:28:12 PM	Tube furnace set to 0
2/17/2011	1:28:12 PM	Run finished at 1:28 PM
2/17/2011	1:28:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	1:43:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	1:43:50 PM	Recipe started at 1:43 PM
2/17/2011	1:43:50 PM	H2 valve closed
2/17/2011	1:43:50 PM	BCl3 valve closed
2/17/2011	1:43:50 PM	PH3 valve closed
2/17/2011	1:43:50 PM	SiCl4 pre valve closed
2/17/2011	1:43:50 PM	SiCl4 post valve closed
2/17/2011	1:43:50 PM	Main Vac valve closed
2/17/2011	1:43:50 PM	Bypass valve closed
2/17/2011	1:43:50 PM	Bubbler valve closed
2/17/2011	1:43:50 PM	Helium valve opened
2/17/2011	1:43:50 PM	Helium MFC set to  500.000000
2/17/2011	1:43:50 PM	H2 MFC set to  0.000000
2/17/2011	1:43:50 PM	BCl3 MFC set to  0.000000
2/17/2011	1:43:50 PM	PHl3 MFC set to  0.000000
2/17/2011	1:43:50 PM	SiCl4 MFC set to  0.000000
2/17/2011	1:43:50 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	1:43:50 PM	Tube furnace set to 0
2/17/2011	1:43:57 PM	Helium valve closed
2/17/2011	1:43:57 PM	H2 valve closed
2/17/2011	1:43:57 PM	BCl3 valve closed
2/17/2011	1:43:57 PM	PH3 valve closed
2/17/2011	1:43:57 PM	SiCl4 pre valve closed
2/17/2011	1:43:57 PM	SiCl4 post valve closed
2/17/2011	1:43:57 PM	Main Vac valve closed
2/17/2011	1:43:57 PM	Bypass valve closed
2/17/2011	1:43:57 PM	Bubbler valve closed
2/17/2011	1:43:57 PM	Helium MFC set to  0.000000
2/17/2011	1:43:57 PM	H2 MFC set to  0.000000
2/17/2011	1:43:57 PM	BCl3 MFC set to  0.000000
2/17/2011	1:43:57 PM	PHl3 MFC set to  0.000000
2/17/2011	1:43:57 PM	SiCl4 MFC set to  0.000000
2/17/2011	1:43:57 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	1:43:57 PM	Tube furnace set to 0
2/17/2011	1:43:58 PM	Run finished at 1:43 PM
2/17/2011	1:43:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	1:46:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2011	1:46:32 PM	Recipe started at 1:46 PM
2/17/2011	1:46:32 PM	Helium valve closed
2/17/2011	1:46:32 PM	H2 valve closed
2/17/2011	1:46:32 PM	BCl3 valve closed
2/17/2011	1:46:32 PM	PH3 valve closed
2/17/2011	1:46:32 PM	SiCl4 pre valve closed
2/17/2011	1:46:32 PM	SiCl4 post valve closed
2/17/2011	1:46:32 PM	Main Vac valve closed
2/17/2011	1:46:32 PM	Bubbler valve closed
2/17/2011	1:46:32 PM	Bypass valve opened
2/17/2011	1:46:32 PM	Helium MFC set to  0.000000
2/17/2011	1:46:32 PM	H2 MFC set to  0.000000
2/17/2011	1:46:32 PM	BCl3 MFC set to  0.000000
2/17/2011	1:46:32 PM	PHl3 MFC set to  0.000000
2/17/2011	1:46:32 PM	SiCl4 MFC set to  0.000000
2/17/2011	1:46:32 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	1:46:32 PM	Tube furnace set to 0
2/17/2011	1:47:04 PM	Helium valve closed
2/17/2011	1:47:04 PM	H2 valve closed
2/17/2011	1:47:04 PM	BCl3 valve closed
2/17/2011	1:47:04 PM	PH3 valve closed
2/17/2011	1:47:04 PM	SiCl4 pre valve closed
2/17/2011	1:47:04 PM	SiCl4 post valve closed
2/17/2011	1:47:04 PM	Bubbler valve closed
2/17/2011	1:47:04 PM	Main Vac valve opened
2/17/2011	1:47:04 PM	Bypass valve opened
2/17/2011	1:47:04 PM	Helium MFC set to  0.000000
2/17/2011	1:47:04 PM	H2 MFC set to  0.000000
2/17/2011	1:47:04 PM	BCl3 MFC set to  0.000000
2/17/2011	1:47:04 PM	PHl3 MFC set to  0.000000
2/17/2011	1:47:04 PM	SiCl4 MFC set to  0.000000
2/17/2011	1:47:04 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	1:47:04 PM	Tube furnace set to 0
2/17/2011	1:47:04 PM	Run finished at 1:47 PM
2/17/2011	1:47:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2011	1:58:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	1:58:58 PM	Recipe started at 1:58 PM
2/17/2011	1:58:58 PM	H2 valve closed
2/17/2011	1:58:58 PM	BCl3 valve closed
2/17/2011	1:58:58 PM	PH3 valve closed
2/17/2011	1:58:58 PM	SiCl4 pre valve closed
2/17/2011	1:58:58 PM	SiCl4 post valve closed
2/17/2011	1:58:58 PM	Main Vac valve closed
2/17/2011	1:58:58 PM	Bypass valve closed
2/17/2011	1:58:58 PM	Bubbler valve closed
2/17/2011	1:58:58 PM	Helium valve opened
2/17/2011	1:58:58 PM	Helium MFC set to  500.000000
2/17/2011	1:58:58 PM	H2 MFC set to  0.000000
2/17/2011	1:58:58 PM	BCl3 MFC set to  0.000000
2/17/2011	1:58:58 PM	PHl3 MFC set to  0.000000
2/17/2011	1:58:58 PM	SiCl4 MFC set to  0.000000
2/17/2011	1:58:58 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	1:58:59 PM	Tube furnace set to 0
2/17/2011	2:00:18 PM	Helium valve closed
2/17/2011	2:00:18 PM	H2 valve closed
2/17/2011	2:00:18 PM	BCl3 valve closed
2/17/2011	2:00:18 PM	PH3 valve closed
2/17/2011	2:00:18 PM	SiCl4 pre valve closed
2/17/2011	2:00:18 PM	SiCl4 post valve closed
2/17/2011	2:00:18 PM	Main Vac valve closed
2/17/2011	2:00:18 PM	Bypass valve closed
2/17/2011	2:00:18 PM	Bubbler valve closed
2/17/2011	2:00:18 PM	Helium MFC set to  0.000000
2/17/2011	2:00:18 PM	H2 MFC set to  0.000000
2/17/2011	2:00:18 PM	BCl3 MFC set to  0.000000
2/17/2011	2:00:18 PM	PHl3 MFC set to  0.000000
2/17/2011	2:00:18 PM	SiCl4 MFC set to  0.000000
2/17/2011	2:00:18 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	2:00:18 PM	Tube furnace set to 0
2/17/2011	2:00:18 PM	Run finished at 2:00 PM
2/17/2011	2:00:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	4:46:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2011	4:46:50 PM	Recipe started at 4:46 PM
2/17/2011	4:46:50 PM	Helium valve closed
2/17/2011	4:46:50 PM	H2 valve closed
2/17/2011	4:46:50 PM	BCl3 valve closed
2/17/2011	4:46:50 PM	PH3 valve closed
2/17/2011	4:46:50 PM	SiCl4 pre valve closed
2/17/2011	4:46:50 PM	SiCl4 post valve closed
2/17/2011	4:46:50 PM	Main Vac valve closed
2/17/2011	4:46:50 PM	Bubbler valve closed
2/17/2011	4:46:50 PM	Bypass valve opened
2/17/2011	4:46:50 PM	Helium MFC set to  0.000000
2/17/2011	4:46:50 PM	H2 MFC set to  0.000000
2/17/2011	4:46:50 PM	BCl3 MFC set to  0.000000
2/17/2011	4:46:50 PM	PHl3 MFC set to  0.000000
2/17/2011	4:46:50 PM	SiCl4 MFC set to  0.000000
2/17/2011	4:46:50 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	4:46:50 PM	Tube furnace set to 0
2/17/2011	4:47:13 PM	Helium valve closed
2/17/2011	4:47:13 PM	H2 valve closed
2/17/2011	4:47:13 PM	BCl3 valve closed
2/17/2011	4:47:13 PM	PH3 valve closed
2/17/2011	4:47:13 PM	SiCl4 pre valve closed
2/17/2011	4:47:13 PM	SiCl4 post valve closed
2/17/2011	4:47:13 PM	Bubbler valve closed
2/17/2011	4:47:13 PM	Main Vac valve opened
2/17/2011	4:47:13 PM	Bypass valve opened
2/17/2011	4:47:13 PM	Helium MFC set to  0.000000
2/17/2011	4:47:13 PM	H2 MFC set to  0.000000
2/17/2011	4:47:13 PM	BCl3 MFC set to  0.000000
2/17/2011	4:47:13 PM	PHl3 MFC set to  0.000000
2/17/2011	4:47:13 PM	SiCl4 MFC set to  0.000000
2/17/2011	4:47:13 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	4:47:13 PM	Tube furnace set to 0
2/17/2011	4:47:13 PM	Run finished at 4:47 PM
2/17/2011	4:47:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2011	5:03:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	5:03:31 PM	Recipe started at 5:03 PM
2/17/2011	5:03:31 PM	H2 valve closed
2/17/2011	5:03:31 PM	BCl3 valve closed
2/17/2011	5:03:31 PM	PH3 valve closed
2/17/2011	5:03:31 PM	SiCl4 pre valve closed
2/17/2011	5:03:31 PM	SiCl4 post valve closed
2/17/2011	5:03:31 PM	Main Vac valve closed
2/17/2011	5:03:31 PM	Bypass valve closed
2/17/2011	5:03:31 PM	Bubbler valve closed
2/17/2011	5:03:31 PM	Helium valve opened
2/17/2011	5:03:31 PM	Helium MFC set to  500.000000
2/17/2011	5:03:31 PM	H2 MFC set to  0.000000
2/17/2011	5:03:31 PM	BCl3 MFC set to  0.000000
2/17/2011	5:03:31 PM	PHl3 MFC set to  0.000000
2/17/2011	5:03:31 PM	SiCl4 MFC set to  0.000000
2/17/2011	5:03:31 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	5:03:31 PM	Tube furnace set to 0
2/17/2011	5:04:52 PM	Helium valve closed
2/17/2011	5:04:52 PM	H2 valve closed
2/17/2011	5:04:52 PM	BCl3 valve closed
2/17/2011	5:04:52 PM	PH3 valve closed
2/17/2011	5:04:52 PM	SiCl4 pre valve closed
2/17/2011	5:04:52 PM	SiCl4 post valve closed
2/17/2011	5:04:52 PM	Main Vac valve closed
2/17/2011	5:04:52 PM	Bypass valve closed
2/17/2011	5:04:52 PM	Bubbler valve closed
2/17/2011	5:04:52 PM	Helium MFC set to  0.000000
2/17/2011	5:04:52 PM	H2 MFC set to  0.000000
2/17/2011	5:04:52 PM	BCl3 MFC set to  0.000000
2/17/2011	5:04:52 PM	PHl3 MFC set to  0.000000
2/17/2011	5:04:52 PM	SiCl4 MFC set to  0.000000
2/17/2011	5:04:52 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	5:04:52 PM	Tube furnace set to 0
2/17/2011	5:04:52 PM	Run finished at 5:04 PM
2/17/2011	5:04:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/17/2011	5:05:56 PM	Bypass valve opened
2/17/2011	5:06:05 PM	Main Vac valve opened
2/17/2011	5:07:10 PM	Main Vac valve closed
2/17/2011	5:07:11 PM	Bypass valve closed
2/17/2011	5:09:33 PM	Bypass valve opened
2/17/2011	5:09:36 PM	Bypass valve closed
2/17/2011	5:09:40 PM	Bypass valve opened
2/17/2011	5:15:26 PM	Bypass valve closed
2/17/2011	5:39:55 PM	Main Vac valve opened
2/17/2011	5:40:01 PM	Main Vac valve closed
2/17/2011	5:40:33 PM	Bypass valve opened
2/17/2011	5:40:35 PM	Bypass valve closed
2/17/2011	5:40:43 PM	Main Vac valve opened
2/17/2011	5:40:50 PM	Main Vac valve closed
2/17/2011	5:57:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/17/2011	5:57:56 PM	Recipe started at 5:57 PM
2/17/2011	5:57:56 PM	Helium valve closed
2/17/2011	5:57:56 PM	H2 valve closed
2/17/2011	5:57:56 PM	BCl3 valve closed
2/17/2011	5:57:56 PM	PH3 valve closed
2/17/2011	5:57:56 PM	SiCl4 pre valve closed
2/17/2011	5:57:56 PM	SiCl4 post valve closed
2/17/2011	5:57:56 PM	Main Vac valve closed
2/17/2011	5:57:56 PM	Bubbler valve closed
2/17/2011	5:57:56 PM	Bypass valve opened
2/17/2011	5:57:56 PM	Helium MFC set to  0.000000
2/17/2011	5:57:56 PM	H2 MFC set to  0.000000
2/17/2011	5:57:56 PM	BCl3 MFC set to  0.000000
2/17/2011	5:57:56 PM	PHl3 MFC set to  0.000000
2/17/2011	5:57:56 PM	SiCl4 MFC set to  0.000000
2/17/2011	5:57:56 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	5:57:56 PM	Tube furnace set to 0
2/17/2011	5:58:32 PM	Helium valve closed
2/17/2011	5:58:32 PM	H2 valve closed
2/17/2011	5:58:32 PM	BCl3 valve closed
2/17/2011	5:58:32 PM	PH3 valve closed
2/17/2011	5:58:32 PM	SiCl4 pre valve closed
2/17/2011	5:58:32 PM	SiCl4 post valve closed
2/17/2011	5:58:32 PM	Bubbler valve closed
2/17/2011	5:58:32 PM	Main Vac valve opened
2/17/2011	5:58:32 PM	Bypass valve opened
2/17/2011	5:58:32 PM	Helium MFC set to  0.000000
2/17/2011	5:58:32 PM	H2 MFC set to  0.000000
2/17/2011	5:58:32 PM	BCl3 MFC set to  0.000000
2/17/2011	5:58:32 PM	PHl3 MFC set to  0.000000
2/17/2011	5:58:32 PM	SiCl4 MFC set to  0.000000
2/17/2011	5:58:32 PM	Bypass solenoid MFC set to  0.000000
2/17/2011	5:58:32 PM	Tube furnace set to 0
2/17/2011	5:58:33 PM	Run finished at 5:58 PM
2/17/2011	5:58:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
